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Structural analysis and optical characterization of low GaAs waveguides fabricated by selective epitaxy

✍ Scribed by N. Vodjdani; M. Erman; J.B. Theeten


Book ID
107789685
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
694 KB
Volume
71
Category
Article
ISSN
0022-0248

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## Abstract Optical waveguides based on benzocyclobutene polymer are fabricated by electron‐beam direct writing without etching. The propagation losses of waveguide measured at 1.55 ΞΌm for both TE and TM polarizations are 0.76 and 0.86 dB/cm, respectively. Moreover, the characteristics of waveguide