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Stress-induced current in nitride and oxidized nitride thin films

✍ Scribed by Mazumder, M.K.; Kobayashi, K.; Mitsuhashi, J.; Koyama, H.

Book ID: 114535961
Publisher: IEEE
Year: 1994
Tongue: English
Weight: 685 KB
Volume: 41
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.337458

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