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Crystallization-induced stress in tungsten nitride thin films

✍ Scribed by Y. G. Shen; Y. W. Mai

Book ID: 110241039
Publisher: Springer
Year: 2000
Tongue: English
Weight: 79 KB
Volume: 19
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1006775821012

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