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Stress evolution influenced by oxide charges on GaN metal–organic chemical vapor deposition on silicon-on-insulator substrate

✍ Scribed by J. Sun; J. Chen; X. Wang; J. Wang; W. Liu; J. Zhu; H. Yang

Book ID: 106020624
Publisher: Springer
Year: 2007
Tongue: English
Weight: 281 KB
Volume: 89
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-007-4077-7

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