✦ LIBER ✦

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

✍ Scribed by Hyoun Woo Kim; Nam Ho Kim

Book ID: 108215042
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 369 KB
Volume: 110
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2004.01.012

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth of YBa2Cu4O8 thin films by metal-

Growth of YBa2Cu4O8 thin films by metal-organic chemical vapor deposition

✍ H. Sakai; Y. Shiohara; S. Tanaka 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 641 KB

Metal organic chemical vapor deposition

Metal organic chemical vapor deposition growth of Cd1−xFexSe thin films

✍ Z.G. Ju; Y.M. Lu; J.Y. Zhang; C.X. Shan; D.X. Zhao; Z.Z. Zhang; B.H. Li; B. Yao; 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Thin films of metal oxides on silicon by

Thin films of metal oxides on silicon by chemical vapor deposition with organometallic compounds. I

✍ M. Balog; M. Schieber; S. Patai; M. Michman 📂 Article 📅 1972 🏛 Elsevier Science 🌐 English ⚖ 249 KB

Growth of In2O3thin films on silicon by

Growth of In2O3thin films on silicon by the metalorganic chemical vapor deposition method

✍ Kim, Nam Ho ;Myung, Ju Hyun ;Kim, Hyoun Woo ;Lee, Chongmu 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 167 KB

## Abstract We have deposited indium oxide (In~2~O~3~) films on silicon substrates by the metal organic chemical vapor deposition (MOCVD). We have investigated the effect of substrate temperature on growth and structural properties of films in the range of 200–300 °C. The films had a preferred orie

Chemical vapor deposition of epitaxial z

Chemical vapor deposition of epitaxial zinc oxide thin films on gallium nitride/sapphire substrates

✍ Wen-Cheng Hou; Bor-Wen Lin; Li Chang; Tzer-Shen Lin; Chih-Wei Lin 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 290 KB

Growth of γ-Al2O3 thin films on silicon

Growth of γ-Al2O3 thin films on silicon by low pressure metal-organic chemical vapour deposition

✍ S.S. Yom; W.N. Kang; Y.S. Yoon; J.I. Lee; D.J. Choi; T.W. Kim; K.Y. Seo; P.H. Hu 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 298 KB