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Chemical vapor deposition of epitaxial zinc oxide thin films on gallium nitride/sapphire substrates

โœ Scribed by Wen-Cheng Hou; Bor-Wen Lin; Li Chang; Tzer-Shen Lin; Chih-Wei Lin


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
290 KB
Volume
1
Category
Article
ISSN
1862-6351

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Structural properties of the epitaxial C
โœ Se-Yun Kim; Sang-Yun Sung; Kwang-Min Jo; Joon-Hyung Lee; Jeong-Joo Kim; S.J. Pea ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 891 KB

We report an investigation of the structural properties of CuCr 0.95 Mg 0.05 O 2 films on c-plane sapphire substrates using pulsed laser deposition. The thin films were grown at different temperatures of 500, 600, and 700 1C with an oxygen partial pressure of 10 mTorr. c-axis oriented epitaxial CuCr