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Stress reduction in GaN films on (111) silicon-on-insulator substrate grown by metal–organic chemical vapor deposition

✍ Scribed by Jiayin Sun; Jing Chen; Xi Wang; Jianfeng Wang; Wei Liu; Jianjun Zhu; Hui Yang

Book ID: 113790948
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 176 KB
Volume: 61
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2007.02.016

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