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Stress determination in strained-Si grown on ultra-thin SiGe virtual substrates

✍ Scribed by T.S. Perova; K. Lyutovich; E. Kasper; A. Waldron; M. Oehme; R.A. Moore

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
208 KB
Volume
135
Category
Article
ISSN
0921-5107

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