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Stress control in reactively sputtered AlN and TiN films

✍ Scribed by Este, G.

Book ID: 127309681
Publisher: AVS (American Vacuum Society)
Year: 1987
Tongue: English
Weight: 832 KB
Volume: 5
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.574480

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