✦ LIBER ✦

Evaluation of impurities in reactive sputtered tin film

Book ID: 104265262
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 162 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80545-8

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✦ Synopsis

Classified abstracts 4523-4531 substrate are minimal. Photoresist images are not degraded, and subsequent lift-off is facilitated., S M Kane and K Y Ahn, J Yuc Sci Tecl~ol, 16 (2). 1979, 171-174.

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