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Stress behaviour of magnetron-sputtered SiC thin films on thermal cycling and annealing

✍ Scribed by Jwo-Huei Jou; Li Hsu; Spring Yeh; Ted Shyy

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 834 KB
Volume: 201
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90155-q

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