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Stress and stress relief in dielectric thin films – the role of hydrogen

✍ Scribed by R.G. Elliman; T.D.M. Weijers-Dall; M.G. Spooner; Tae-Hyun Kim; A.R. Wilkinson

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 153 KB
Volume: 249
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.04.018

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