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Evolution of stress and structure in Cu thin films

โœ Scribed by D. Chocyk; T. Zientarski; A. Proszynski; T. Pienkos; L. Gladyszewski; G. Gladyszewski


Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
474 KB
Volume
40
Category
Article
ISSN
0232-1300

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