Determination of Deformation Induced by Thin Film Residual Stress in Structures of Millimeter Size

✍ Scribed by I.E. Lukács; Z. Vízváry; P. Fürjes; F. Riesz; C. Dücsö; I. Bársony

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 163 KB
• Volume: 4
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/1527-2648(20020806)4:8<625::aid-adem625>3.0.co;2-e