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Strain modification in epitaxial 2H-AlN layers on 3C-SiC/Si(111) pseudo-substrates

✍ Scribed by Nader, R.; Pezoldt, J.

Book ID: 122461241
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 477 KB
Volume: 20
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2011.03.006

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