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Interfacial strain in 3C-SiC/Si(100) pseudo-substrates for cubic nitride epitaxy

✍ Scribed by Bustarret, E. ;Vobornik, D. ;Roulot, A. ;Chassagne, T. ;Ferro, G. ;Monteil, Y. ;Martinez-Guerrero, E. ;Mariette, H. ;Daudin, B. ;Dang, Le Si


Book ID
105362140
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
289 KB
Volume
195
Category
Article
ISSN
0031-8965

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Elaboration of (1 1 1) oriente
✍ M. Zielinski; M. Portail; S. Roy; T. Chassagne; C. Moisson; S. Kret; Y. Cordier πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 998 KB

Various aspects of the elaboration of (1 1 1) oriented 3C-SiC films on silicon are discussed within a comparative study of different layer characteristics for (1 1 1) and (1 0 0) orientations. The dissimilarities between both orientations are pointed out. This includes the growth mode during the nuc