Comparative Studies of Carrier Dynamics in 3C-SiC Layers Grown on Si and 4H-SiC Substrates
✍ Scribed by Patrik Ščajev; Jawad Hassan; Kęstutis Jarašiūnas; Masashi Kato; Anne Henry; J. Peder Bergman
- Book ID
- 107457048
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 522 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0361-5235
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📜 SIMILAR VOLUMES
A transmission electron microscopy (TEM) study on the generation of stacking faults (SFs) and stacking fault (SF) induced inclusion during 3C-SiC growth by Continuous Feed Physical Vapour Transport (CF-PVT) method on 4H-SiC substrates is presented. A transition region of about 100 nm between the 4H-
## Abstract This paper reports the MOVPE growth of InN on a 3c‐SiC/Si template formed by C^+^‐ion implantation into Si(111). Properties of grown films on the template are compared with those grown on sapphire in the same run. By employing the nitridation process of the template at 900 °C for 30 min