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Strain evaluation in III–V compound epitaxial layers

✍ Scribed by U. Bangert; P. Charsley; D.A. Faux; J.A. Harvey

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
254 KB
Volume
9
Category
Article
ISSN
0749-6036

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We present a study of changes in the layer morphology of symmetrically strained (GaIn)As/ \(\mathrm{Ga}(\mathrm{PAs})\) superlattices as a function of strain and off-orientation of substrates. The samples were deposited by metal-organic vapour-phase epitaxy (MOVPE). For samples grown on exactly orie