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Strain and interfacial bond type effects on structural quality of InAs/Ga(As,Sb) superlattices grown on InAs substrates

✍ Scribed by Sarney, W.L.; Leavitt, R.P.


Book ID
114456002
Publisher
The Institution of Electrical Engineers
Year
2003
Tongue
English
Weight
562 KB
Volume
150
Category
Article
ISSN
1350-2433

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A systematic theoretical analysis is presented of the combined effects of substrate compliance and film compositional grading on the relaxation of strain due to lattice mismatch in layer-by-layer semiconductor heteroepitaxy. The analysis is based on a combination of continuum elasticity theory and a