✦ LIBER ✦

Stochastic heating in single and dual frequency capacitive discharges

✍ Scribed by Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Collisionless Heating in Capacitive Disc

✍ Turner, M. M.; Chabert, P. 📂 Article 📅 2006 🏛 The American Physical Society 🌐 English ⚖ 245 KB

Simulation of Capacitively Coupled Singl

✍ Lee, J.K.; Babaeva, N.Y.; Kim, H.C.; Manuilenko, O.V.; Shon, J.W. 📂 Article 📅 2004 🏛 IEEE 🌐 English ⚖ 285 KB

Role of low-frequency power in dual-freq

✍ Ahn, S. K.; Chang, H. Y. 📂 Article 📅 2009 🏛 American Institute of Physics 🌐 English ⚖ 430 KB

Electron bounce resonance heating in dua

✍ Liu, Yong-Xin; Zhang, Quan-Zhi; Liu, Jia; Song, Yuan-Hong; Bogaerts, Annemie; Wa 📂 Article 📅 2013 🏛 Institute of Physics 🌐 English ⚖ 689 KB

Electron heating of voltage-driven and m

✍ Lieberman, M A; Lichtenberg, A J 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 203 KB

The influence of the relative phase betw

✍ Ziegler, D; Trieschmann, J; Mussenbrock, T; Brinkmann, R P; Schulze, J; Czarnetz 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 583 KB