✦ LIBER ✦
The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges
✍ Scribed by Ziegler, D; Trieschmann, J; Mussenbrock, T; Brinkmann, R P; Schulze, J; Czarnetzki, U; Semmler, E; Awakowicz, P; O'Connell, D; Gans, T
- Book ID
- 121457343
- Publisher
- Institute of Physics
- Year
- 2010
- Tongue
- English
- Weight
- 583 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0963-0252
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