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Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane

✍ Scribed by Jérôme Perrin; Yoshihiko Takeda; Naoto Hirano; Yoshiaki Takeuchi; Akihisa Matsuda


Book ID
118362620
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
990 KB
Volume
210
Category
Article
ISSN
0039-6028

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