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Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon

✍ Scribed by Akihisa Matsuda; Katsuhiko Nomoto; Yoshiaki Takeuchi; Atsushi Suzuki; Akimasa Yuuki; Jérôme Perrin


Book ID
118258594
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
636 KB
Volume
227
Category
Article
ISSN
0039-6028

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