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Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane

✍ Scribed by Jérôme Perrin; Yoshihiko Takeda; Naoto Hirano; Yoshiaki Takeuchi; Akihisa Matsuda

Publisher: Elsevier Science
Year: 1989
Weight: 47 KB
Volume: 210
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(89)90788-3

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