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Effect of Si3N4 encapsulation on the thermal processing of hydrogenated amorphous silicon

✍ Scribed by J.O. Olowolafe

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 296 KB
Volume: 161
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90249-0

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