Semiconductor processing and manufacturi
โ
William N. Shafarman; Bulent M. Basol; Jeff S. Britt; Robert B. Hall; Richard E.
๐
Article
๐
1997
๐
John Wiley and Sons
๐
English
โ 155 KB
The viability of semiconductor deposition and treatment processes for manufacturing are assessed and critical issues identiยฎed for CdTe, Cu(InGa)Se 2 , thin ยฎlm silicon and amorphous silicon technologies. The focus is on increasing throughput and decreasing costs. Speciยฎc issues include deposition r