𝔖 Bobbio Scriptorium
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Stabilization of sputtered β-tantalum by a tantalum silicide interlayer

✍ Scribed by K. Hieber; E. Lautenbacher

Book ID
107862769
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
395 KB
Volume
66
Category
Article
ISSN
0040-6090

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Depth profiles have been made for a new batch of the certified reference material, BCR 261, of ~30 nm and 100 nm of anodic tantalum pentoxide layers on tantalum foil. Atomic force microscopy studies show that the preparation method traditionally used provides an excellent substrate root-mean-square