✦ LIBER ✦
Quantitative analysis of thin oxide and nitride layers on tantalum by sputtered neutral mass spectrometry
✍ Scribed by H. Oechsner; A. Wucher
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 111 KB
- Volume
- 90
- Category
- Article
- ISSN
- 0040-6090
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