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Stability and surface properties of Ge-Si alloy films on Si(111) substrate

✍ Scribed by E.G. McRae; R.A. Malic


Publisher
Elsevier Science
Year
1986
Weight
103 KB
Volume
165
Category
Article
ISSN
0167-2584

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Surface roughness and resistivity of Au
✍ Wu Tang; Kewei Xu; Ping Wang; Xian Li πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 188 KB

Au films were deposited on Si-(111) substrate by magnetron sputtering technique. The structure of the films was characterized by X-ray diffraction (XRD). The resistivity and the surface roughness were measured by four-point probe and atomic force microscopy (AFM). The results showed that Au-( ) was