Interfacial reactions of ultrahigh-vacuum-deposited Cu thin films on Si, Ge and on epitaxial Si–Ge layers on Si and Ge

✍ Scribed by L.J. Chen; C.S. Liu; J.B. Lai

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 822 KB
• Volume: 7
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2004.06.003