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Squeeze film effects on dynamic performance of MEMS

✍ Scribed by Wang-Long Li

Publisher
Springer-Verlag
Year
2007
Tongue
English
Weight
454 KB
Volume
14
Category
Article
ISSN
0946-7076

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πŸ“œ SIMILAR VOLUMES

Research on the dynamic performance of M
Research on the dynamic performance of MEMS micromirrors
✍ Dai Enguang; M. A. Matin; Yan Guan πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 681 KB

## Abstract This paper presents a series of dynamic problems in developing and characterizing micromirror. A new application of MEMS micromirror‐based fast tunable VCSEL in wavelength routing switching has been proposed. The micromirror dynamic design aspects such as working modal selection, modal