✦ LIBER ✦
Numerical and experimental comparison of MEMS suspended plates dynamic behaviour under squeeze film damping effect
✍ Scribed by Aurelio Somà; Giorgio De Pasquale
- Publisher
- Springer
- Year
- 2008
- Tongue
- English
- Weight
- 835 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0925-1030
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