✦ LIBER ✦
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration
✍ Scribed by C. Feng; Ya-Pu Zhao; D. Q. Liu
- Publisher
- Springer-Verlag
- Year
- 2006
- Tongue
- English
- Weight
- 403 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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