Research on the dynamic performance of MEMS micromirrors

✍ Scribed by Dai Enguang; M. A. Matin; Yan Guan

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 681 KB
• Volume: 35
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.10531

✦ Synopsis

Abstract

This paper presents a series of dynamic problems in developing and characterizing micromirror. A new application of MEMS micromirror‐based fast tunable VCSEL in wavelength routing switching has been proposed. The micromirror dynamic design aspects such as working modal selection, modal sequence shift, dynamic deformation, and electrical parameter fluctuation have been studied. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 35: 111–113, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10531