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Sputtering yields of Ru, Mo, and Si under low energy Ar[sup +] bombardment

✍ Scribed by Wu, Shiou-Min; van de Kruijs, Robbert; Zoethout, Erwin; Bijkerk, Fred


Book ID
121786047
Publisher
American Institute of Physics
Year
2009
Tongue
English
Weight
668 KB
Volume
106
Category
Article
ISSN
0021-8979

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