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Low energy Ar ion bombardment damage of Si, GaAs, and InP surfaces

✍ Scribed by R.Stanley Williams

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 249 KB
Volume: 41
Category: Article
ISSN: 0038-1098
DOI: 10.1016/0038-1098(82)91056-0

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