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Total sputtering yields of solids under MeV-energy Si ion bombardment

✍ Scribed by Satoshi Ninomiya; Chikage Imada; Masafumi Nagai; Yoshihiko Nakata; Takaaki Aoki; Jiro Matsuo; Nobutsugu Imanishi

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 215 KB
Volume: 230
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.12.088

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We have found a typographical error on page 153: the constant in Eq. ( ) should read as 84.78 (in units of eV A ˚2/atom) rather than 8.478. This error did not affect any of the results presented in this paper since the correct value was in fact used in the Sample Calculation of the Sputtering Yield