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Roughening and smoothing behavior of single crystal Si by low energy Ar+ ion bombardment

✍ Scribed by S.A. Pahlovy; S.F. Mahmud; K. Yanagimoto; N. Aikawa; I. Miyamoto


Book ID
113823347
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
723 KB
Volume
272
Category
Article
ISSN
0168-583X

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