✦ LIBER ✦
Study of residual damage in Si(001) due to low energy (110 eV) Ar+ and Cl+ bombardment using medium energy ion scattering
✍ Scribed by AmirH. Al-Bayati; KevinG. Orrman-Rossiter; D.G. Armour
- Publisher
- Elsevier Science
- Year
- 1991
- Weight
- 72 KB
- Volume
- 249
- Category
- Article
- ISSN
- 0167-2584
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