Modification of crystalline semiconductor surfaces by low-energy Ar+ bombardment: Si(111) and Ge(100)

✍ Scribed by W. Bock; H. Gnaser; H. Oechsner

• Publisher: Elsevier Science
• Year: 1993
• Weight: 76 KB
• Volume: 282
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(93)91077-2