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Sputtering of Ta2O5 by Ar+ ions at energies below 1 keV

✍ Scribed by H. Oechsner; H. Schoof; E. Stumpe

Book ID: 118982177
Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 884 KB
Volume: 76
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(78)90102-4

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