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Sputtering by 20-Kev Ar + ions at normal incidence on meteorites

โœ Scribed by Heymann, D.; Fluit, J. M.

Book ID
119724348
Publisher
American Geophysical Union
Year
1962
Tongue
English
Weight
321 KB
Volume
67
Category
Article
ISSN
0148-0227

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Comparative study of silicon and germani
Comparative study of silicon and germanium sputtering by 1โ€“20 keV Ar ions
โœ V.I. Shulga ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 155 KB

Sputtering of amorphous Si and Ge targets by 1-20 keV Ar ions has been studied using the binary-collision simulation. Special attention was given to the angular distribution of sputtered atoms; namely, the energy dependence of the exponent n in the function cos n h approximating the angular distribu