✦ LIBER ✦

Sputtering of AlxGa1−xAs semiconductor targets by Ar+ions with energies of 2–14 keV

✍ Scribed by N. A. Berg; I. P. Soshnikov

Book ID: 110120701
Publisher: Springer
Year: 1997
Tongue: English
Weight: 390 KB
Volume: 42
Category: Article
ISSN: 1063-7842
DOI: 10.1134/1.1258823

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sputtering of Ta2O5 by Ar+ ions at energ

Sputtering of Ta2O5 by Ar+ ions at energies below 1 keV

✍ H. Oechsner; H. Schoof; E. Stumpe 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 884 KB

Comparative study of silicon and germani

Comparative study of silicon and germanium sputtering by 1–20 keV Ar ions

✍ V.I. Shulga 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 155 KB

Sputtering of amorphous Si and Ge targets by 1-20 keV Ar ions has been studied using the binary-collision simulation. Special attention was given to the angular distribution of sputtered atoms; namely, the energy dependence of the exponent n in the function cos n h approximating the angular distribu

Temporal development of sputtered atom d

Temporal development of sputtered atom distributions from Au(1 1 1) targets following bombardment with 100 keV/atom Au2 ions

✍ M.H Shapiro; T.A Tombrello 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 401 KB

The Energy Distribution of Positive Seco

The Energy Distribution of Positive Secondary Ions Emitted from Metal and Semiconductor Targets Bombarded with 12 keV Ar+ Ions

✍ Düsterhöft, H. ;Ihlenfeld, A. 📂 Article 📅 1977 🏛 John Wiley and Sons 🌐 English ⚖ 167 KB

Deep surface damage of SiO2 by sputterin

Deep surface damage of SiO2 by sputtering with low energy Ar-ions

✍ E Collart; R.J Visser 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 440 KB

Desorption of gold nanoclusters (2–30&#x

Desorption of gold nanoclusters (2–30 nm) under low excitation of their electronic subsystem by Ar ions (14 keV/nm)

✍ I. Baranov; M. Galaktionov; G. Gusinsky; S. Kirillov; V. Naidenov; V. Obnorskii; 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 601 KB