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Sputtering of thin films by 100 keV Ar+ ions

โœ Scribed by D. Trbojevic; P.A. Treado; G.S. Daniel


Book ID
113276818
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
304 KB
Volume
10-11
Category
Article
ISSN
0168-583X

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