✦ LIBER ✦

Sputtering effect of gas cluster ion beams

✍ Scribed by T. Yamaguchi; J. Matsuo; M. Akizuki; C.E. Ascheron; G.H. Takaoka; I. Yamada

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Size effects of gas cluster ions on beam

✍ Noriaki Toyoda; Isao Yamada 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 736 KB

AIP Conference Proceedings [AIP ION IMPL

✍ Ichiki, K.; Ninomiya, S.; Seki, T.; Aoki, T.; Matsuo, J.; Matsuo, Jiro; Kase, Ma 📂 Article 📅 2011 🏛 AIP ⚖ 697 KB

Reactive sputtering by SF6 cluster ion b

✍ N. Toyoda; H. Kitani; J. Matsuo; I. Yamada 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 432 KB

Surface modifications by gas cluster ion

✍ I. Yamada; J. Matsuo; Z. Insepov; M. Akizuki 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 482 KB

Surface modification with gas cluster io

✍ I. Yamada; W.L. Brown; J.A. Norhby; M. Sosnowski 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 434 KB

Gas cluster ion beams for wafer processi

✍ M.E. Mack 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 282 KB