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Sputter erosion of Si(0 0 1) using a new silicon MEAM potential and different thermostats

✍ Scribed by Maria Timonova; Beyong-Joo Lee; Barend J. Thijsse


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
795 KB
Volume
255
Category
Article
ISSN
0168-583X

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We measured charge state dependence and incident angle dependence of sputtering yields and two-dimensional (2D) position distributions for H + , Si + and SiOH + ions emitted from a water adsorbed Si(1 0 0) surface irradiated by a few keV Ar q+ (q = 4-8). It was found that (1) H + yield strongly depe