Potential sputtering and kinetic sputter
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N. Okabayashi; K. Komaki; Y. Yamazaki
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Article
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2005
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Elsevier Science
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English
β 241 KB
We measured charge state dependence and incident angle dependence of sputtering yields and two-dimensional (2D) position distributions for H + , Si + and SiOH + ions emitted from a water adsorbed Si(1 0 0) surface irradiated by a few keV Ar q+ (q = 4-8). It was found that (1) H + yield strongly depe