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Sputter deposition and XPS analysis of nickel silicide thin films

✍ Scribed by P.L. Tam; L. Nyborg

Book ID: 108278548
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 442 KB
Volume: 203
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2009.03.001

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