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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Perspectives of microsystem engineering developments in Russia

✍ Scribed by Maltsev, Petr P.; Courtois, Bernard; Karam, Jean Michel; Markus, Karen W.; Michel, Bernd; Mukherjee, Tamal; Walker, James A.

No coin nor oath required. For personal study only.

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