SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

✍ Scribed by Jozwik, Michal; Sabac, Andrei; Gorecki, Christophe; Courtois, Bernard; Karam, Jean Michel; Markus, Karen W.; Michel, Bernd; Mukherjee, Tamal; Walker, James A.

• Book ID: 120628668
• Publisher: SPIE
• Year: 2002
• Weight: 252 KB
• Volume: 4755
• Category: Article
• DOI: 10.1117/12.462881