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SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Coupling of length scales in MEMS modeling: the atomic limit of finite elements

โœ Scribed by Rudd III, Robert E.; Courtois, Bernard; Crary, Selden B.; Gabriel, Kaigham J.; Karam, Jean Michel; Markus, Karen W.; Tay, Andrew A. O.


Book ID
120405291
Publisher
SPIE
Year
2000
Weight
407 KB
Volume
4019
Category
Article

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