𝔖 Bobbio Scriptorium

✦ LIBER ✦

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Coupling of length scales in MEMS modeling: the atomic limit of finite elements

✍ Scribed by Rudd III, Robert E.; Courtois, Bernard; Crary, Selden B.; Gabriel, Kaigham J.; Karam, Jean Michel; Markus, Karen W.; Tay, Andrew A. O.

Book ID: 120405291
Publisher: SPIE
Year: 2000
Weight: 407 KB
Volume: 4019
Category: Article
DOI: 10.1117/12.382286

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Symposium on Desi

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Perspectives of microsystem engineering developments in Russia

✍ Maltsev, Petr P.; Courtois, Bernard; Karam, Jean Michel; Markus, Karen W.; Miche 📂 Article 📅 2002 🏛 SPIE ⚖ 995 KB

[IEEE Symposium on Design, Test, Integra

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - The hierarchical HDL-based design of an integrated MEMS-CMOS oscillator

✍ Gaddi, R. 📂 Article 📅 2003 🏛 IEEE ⚖ 290 KB

[IEEE Symposium on Design, Test, Integra

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - The impact of MEMS and NEMS on Biotechnology in the 21st Century

✍ Amdou, M. 📂 Article 📅 2003 🏛 IEEE ⚖ 38 KB

SPIE Proceedings [SPIE Symposium on Desi

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Cannes-Mandelieu, France (Tuesday 19 March 2002)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 - Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

✍ Jozwik, Michal; Sabac, Andrei; Gorecki, Christophe; Courtois, Bernard; Karam, Je 📂 Article 📅 2002 🏛 SPIE ⚖ 252 KB

[IEEE Symposium on Design, Test, Integra

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Behavioral modeling and simulation of micromechanical resonator for communications applications

✍ Mandelbaum, C.; Cases, S.; Bensaude, D.; Basteres, L.; Nachtergaele, P. 📂 Article 📅 2003 🏛 IEEE ⚖ 458 KB